Micro- and nanostructured materials play a crucial role in various optical and quantum applications, enabling the realization of specific functional properties. In both research and industry, the characterization of such surfaces is essential to ensure quality and performance. Scanning Electron Microscopy (SEM) is a widely used technique for surface analysis at the micro- and nanoscale. However, due to the high cost and limited availability of SEM equipment, students typically receive only theoretical instruction in SEM operation. This challenge is even more pronounced for SEM systems within cleanroom environments, where access for students is often highly restricted or unavailable.

This work presents an immersive Virtual Reality (VR) application designed to bridge the gap between theoretical knowledge and practical training in SEM operation under cleanroom conditions. The learning content covered in the VR training is outlined, and advantages and limitations of VR based learning resources compared to conventional training methods are discussed. The application was tested with a small group of students, and both learning outcomes and user experience were qualitatively assessed. Finally, key insights for integrating VR-based training into existing academic curricula are presented.

Keywords: Virtual Reality, VR, higher education, photonics.